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NFPA 318(06)
Standard for the Protection of Semiconductor Fabrication Facilities

Approx. 31 pp., 2006
$45.00


This Standard applies to semiconductor fabrication facilities and comparable research and development areas in which hazardous chemicals are used, stored, and handled and containing a cleanroom or clean zone, or both.

The 2006 edition of NFPA 318 has been revised with extracted information from NFPA 5000 ® : Building Construction and Safety Code ® dealing with hazardous chemicals in cleanrooms . The document complies with NFPA's Manual of Style.