Protection of Semiconductor Fabrication Facilities

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NFPA 318
Standard for the Protection of Semiconductor Fabrication Facilities

Published: 2012
Format: Book
Status: Active
Order #: 31812

Price: $37.50

Current Edition: 2012 Next Edition: 2015

Scope.

This standard applies to semiconductor fabrication facilities and comparable fabrication processes, including research and development areas in which hazardous chemicals are used, stored, and handled and containing what is herein defined as a cleanroom or clean zone, or both

About NFPA

The world's leading advocate of fire prevention and an authoritative source on public safety, NFPA develops, publishes, and disseminates more than 300 consensus codes and standards intended to minimize the possibility and effects of fire and other risks.


The mission of NFPA is to reduce the burden of fire and other hazards!

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